2

Miniature X-Ray Sources

Year:
2017
Language:
english
File:
PDF, 2.03 MB
english, 2017
6

Structural and electrical properties of Ti-Al thin films

Year:
1979
Language:
english
File:
PDF, 269 KB
english, 1979
13

Silicon optical pressure sensor

Year:
1992
Language:
english
File:
PDF, 700 KB
english, 1992
15

Miniature and MEMS-type vacuum sensors and pumps

Year:
2009
Language:
english
File:
PDF, 721 KB
english, 2009
22

Low vacuum MEMS Ion-sorption Micropump

Year:
2016
Language:
english
File:
PDF, 579 KB
english, 2016
23

Aging Degradation of Ni and NiCr-Ni Thin Film Conductor Systems

Year:
1982
Language:
english
File:
PDF, 1.71 MB
english, 1982
26

Desorption/ionization mass spectrometry on array of silicon microtips

Year:
2005
Language:
english
File:
PDF, 1.27 MB
english, 2005
28

Magnetron-like miniature ion source

Year:
2018
Language:
english
File:
PDF, 2.57 MB
english, 2018
38

Glow-discharge ion-sorption micropump for vacuum MEMS

Year:
2014
Language:
english
File:
PDF, 1.91 MB
english, 2014
41

Vacuum and Residual Gas Composition MEMS Sensor

Year:
2015
Language:
english
File:
PDF, 979 KB
english, 2015
44

MEMS type ionization vacuum sensor

Year:
2016
Language:
english
File:
PDF, 3.23 MB
english, 2016